Introduction to Semiconductor and MEMS Fabrication

This specialization covers a breadth of topics that range from fundamentals of fabrication building block technologies to device design principles and tools. Modules introduce the basic process techniques of deposition, lithography, and etching. FEA (finite element analysis) design tools and other ancillary fabrication processes specific to device types like memory circuit chip are also presented.

Video lectures, suggested readings, and regular knowledge checks provide learners with a solid foundation of key processes, materials, and equipment used for the fabrication of semiconductor and MEMS (micro-electromechanical systems) devices. This work will prepare learners for more comprehensive study or on-the-job training. 

All U of M Coursera courses, including those that are part of this specialization, may be taken individually.

The specialization takes approximately four months to complete at the suggested pace of four hours per week. Coursera for Minnesota gives U of M students, faculty, and staff free access to courses and specializations.